Synthesis and characterisation of two novel titanium isopropoxides stabilised with a chelating alkoxide: Their use in the liquid injection MOCVD of titanium dioxide thin films

Anthony C. Jones; Timothy J. Leedham; Peter J. Wright; Michael J. Crosbie; Kirsty A. Fleeting; David J. Otway; Paul O'Brien; Martyn E. Pemble

doi:10.1039/a802933d

Synthesis and characterisation of two novel titanium isopropoxides stabilised with a chelating alkoxide: Their use in the liquid injection MOCVD of titanium dioxide thin films

Anthony C. Jones
, Timothy J. Leedham
, Peter J. Wright
, Michael J. Crosbie
, Kirsty A. Fleeting
, David J. Otway
, Paul O'Brien
, Martyn E. Pemble

Research output: Contribution to journal › Article › peer-review

Abstract

The new precursors [Ti(OPrⁱ)₃(OCH₂CH₂NMe₂)] 1 and [Ti(OPrⁱ)₂(OCH₂CH₂NMe ₂)₂] 2 have been prepared and characterised. Compound 1 exists in solution at room temperature as a mixture of monomer and dimer(s), however at elevated temperatures the monomer predominates. Compound 2 exists in solution predominantly as a monomeric complex presumably with pseudo-octahedral coordination at the metal centre. Thin films of TiO₂ have been deposited at 300-450°C by liquid injection MOCVD using both 1 and 2. Analysis of the films by Auger electron spectroscopy failed to detect nitrogen although trace carbon was detected at levels of between 2.9 and 7.7%. The potential utility of these modified compounds as precursors to TiO₂ is discussed.

Original language	English
Article number	8/02933D
Pages (from-to)	1773-1777
Number of pages	5
Journal	Journal of Materials Chemistry
Volume	8
Issue number	8
DOIs	https://doi.org/10.1039/a802933d
Publication status	Published - Aug 1998
Externally published	Yes

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Jones, A. C., Leedham, T. J., Wright, P. J., Crosbie, M. J., Fleeting, K. A., Otway, D. J., O'Brien, P., & Pemble, M. E. (1998). Synthesis and characterisation of two novel titanium isopropoxides stabilised with a chelating alkoxide: Their use in the liquid injection MOCVD of titanium dioxide thin films. Journal of Materials Chemistry, 8(8), 1773-1777. Article 8/02933D. https://doi.org/10.1039/a802933d

@article{ac505ebed90e417aa08f94c9fabb91d0,

title = "Synthesis and characterisation of two novel titanium isopropoxides stabilised with a chelating alkoxide: Their use in the liquid injection MOCVD of titanium dioxide thin films",

abstract = "The new precursors [Ti(OPri)3(OCH2CH2NMe2)] 1 and [Ti(OPri)2(OCH2CH2NMe 2)2] 2 have been prepared and characterised. Compound 1 exists in solution at room temperature as a mixture of monomer and dimer(s), however at elevated temperatures the monomer predominates. Compound 2 exists in solution predominantly as a monomeric complex presumably with pseudo-octahedral coordination at the metal centre. Thin films of TiO2 have been deposited at 300-450°C by liquid injection MOCVD using both 1 and 2. Analysis of the films by Auger electron spectroscopy failed to detect nitrogen although trace carbon was detected at levels of between 2.9 and 7.7\%. The potential utility of these modified compounds as precursors to TiO2 is discussed.",

author = "Jones, \{Anthony C.\} and Leedham, \{Timothy J.\} and Wright, \{Peter J.\} and Crosbie, \{Michael J.\} and Fleeting, \{Kirsty A.\} and Otway, \{David J.\} and Paul O'Brien and Pemble, \{Martyn E.\}",

year = "1998",

month = aug,

doi = "10.1039/a802933d",

language = "English",

volume = "8",

pages = "1773--1777",

journal = "Journal of Materials Chemistry",

issn = "0959-9428",

publisher = "Royal Society of Chemistry",

number = "8",

}

Jones, AC, Leedham, TJ, Wright, PJ, Crosbie, MJ, Fleeting, KA, Otway, DJ, O'Brien, P & Pemble, ME 1998, 'Synthesis and characterisation of two novel titanium isopropoxides stabilised with a chelating alkoxide: Their use in the liquid injection MOCVD of titanium dioxide thin films', Journal of Materials Chemistry, vol. 8, no. 8, 8/02933D, pp. 1773-1777. https://doi.org/10.1039/a802933d

Synthesis and characterisation of two novel titanium isopropoxides stabilised with a chelating alkoxide: Their use in the liquid injection MOCVD of titanium dioxide thin films. / Jones, Anthony C.; Leedham, Timothy J.; Wright, Peter J. et al.
In: Journal of Materials Chemistry, Vol. 8, No. 8, 8/02933D, 08.1998, p. 1773-1777.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Synthesis and characterisation of two novel titanium isopropoxides stabilised with a chelating alkoxide

T2 - Their use in the liquid injection MOCVD of titanium dioxide thin films

AU - Jones, Anthony C.

AU - Leedham, Timothy J.

AU - Wright, Peter J.

AU - Crosbie, Michael J.

AU - Fleeting, Kirsty A.

AU - Otway, David J.

AU - O'Brien, Paul

AU - Pemble, Martyn E.

PY - 1998/8

Y1 - 1998/8

N2 - The new precursors [Ti(OPri)3(OCH2CH2NMe2)] 1 and [Ti(OPri)2(OCH2CH2NMe 2)2] 2 have been prepared and characterised. Compound 1 exists in solution at room temperature as a mixture of monomer and dimer(s), however at elevated temperatures the monomer predominates. Compound 2 exists in solution predominantly as a monomeric complex presumably with pseudo-octahedral coordination at the metal centre. Thin films of TiO2 have been deposited at 300-450°C by liquid injection MOCVD using both 1 and 2. Analysis of the films by Auger electron spectroscopy failed to detect nitrogen although trace carbon was detected at levels of between 2.9 and 7.7%. The potential utility of these modified compounds as precursors to TiO2 is discussed.

AB - The new precursors [Ti(OPri)3(OCH2CH2NMe2)] 1 and [Ti(OPri)2(OCH2CH2NMe 2)2] 2 have been prepared and characterised. Compound 1 exists in solution at room temperature as a mixture of monomer and dimer(s), however at elevated temperatures the monomer predominates. Compound 2 exists in solution predominantly as a monomeric complex presumably with pseudo-octahedral coordination at the metal centre. Thin films of TiO2 have been deposited at 300-450°C by liquid injection MOCVD using both 1 and 2. Analysis of the films by Auger electron spectroscopy failed to detect nitrogen although trace carbon was detected at levels of between 2.9 and 7.7%. The potential utility of these modified compounds as precursors to TiO2 is discussed.

UR - https://www.scopus.com/pages/publications/0001336142

U2 - 10.1039/a802933d

DO - 10.1039/a802933d

M3 - Article

AN - SCOPUS:0001336142

SN - 0959-9428

VL - 8

SP - 1773

EP - 1777

JO - Journal of Materials Chemistry

JF - Journal of Materials Chemistry

IS - 8

M1 - 8/02933D

ER -

Synthesis and characterisation of two novel titanium isopropoxides stabilised with a chelating alkoxide: Their use in the liquid injection MOCVD of titanium dioxide thin films

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