Tertiarybutylarsine damage-free thin-film doping and conformal surface coverage of substrate-released horizontal Si nanowires
- Fintan Meaney
- , Kevin Thomas
- , John MacHale
- , Gioele Mirabelli
- , Noel Kennedy
- , James Connolly
- , Chris Hatem
- , Nikolay Petkov
- , Brenda Long
- , Emanuele Pelucchi
- , Ray Duffy
- Applied Materials
- Applied Materials Incorporated
- Munster Technological University
Research output: Contribution to journal › Article › peer-review