The effect of dielectric stress on the electrical characteristics of AlGaN/GaN heterostructure field-effect transistors (HFETs)

  • W. S. Tan
  • , G. Hill
  • , P. A. Houston
  • , M. W. Low
  • , P. J. Parbrook
  • , R. J. Airey

Research output: Chapter in Book/Report/Conference proceedingsConference proceedingpeer-review

Abstract

We present an experimental analysis on the effect of dielectric stress on the electrical characteristics of AlGaN/GaN HFETs. Issues such as maximum current (Id-max), gate leakage and current collapse are presented. Different dielectric deposition conditions were used to vary the amount of stress induced on the wafer and the devices were measured before and after passivation. A striking feature observed was the strong dependence of Id-max on the amount of stress induced by the dielectric. Id-max increases when the stress is tensile and reduces when it is compressive. The rise in leakage current was found to be dependent on the dielectric film itself and not on the stress induced, which suggests that a surface effect is responsible for the leakage mechanism.

Original languageEnglish
Title of host publication10th IEEE International Symposium on Electron Devices for Microwave and Optoelectronic Applications, EDMO 2002
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages130-135
Number of pages6
ISBN (Electronic)0780375300
DOIs
Publication statusPublished - 2002
Externally publishedYes
Event10th IEEE International Symposium on Electron Devices for Microwave and Optoelectronic Applications, EDMO 2002 - Manchester, United Kingdom
Duration: 18 Nov 200219 Nov 2002

Publication series

NameIEEE International Symposium on Electron Devices for Microwave and Optoelectronic Applications
Volume2002-January

Conference

Conference10th IEEE International Symposium on Electron Devices for Microwave and Optoelectronic Applications, EDMO 2002
Country/TerritoryUnited Kingdom
CityManchester
Period18/11/0219/11/02

Keywords

  • Aluminum gallium nitride
  • Compressive stress
  • Dielectrics
  • Electric variables
  • Gallium nitride
  • Gate leakage
  • HEMTs
  • Leakage current
  • MODFETs
  • Tensile stress

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