The Effects of Fabrication Process on the Performance of a CMOS Based Capacitive Humidity Sensor

Alan Blake

doi:10.1149/ma2011-01/45/2064

The Effects of Fabrication Process on the Performance of a CMOS Based Capacitive Humidity Sensor

Alan Blake

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Meeting Abstracts
DOIs	https://doi.org/10.1149/ma2011-01/45/2064
Publication status	Published - 2011

Keywords

Capacitive sensing
Fabrication
Humidity
CMOS
Materials science
Process (computing)
Optoelectronics
Electrical engineering
Computer science
Engineering
Medicine
Physics
Meteorology
Alternative medicine
Pathology
Operating system

Access to Document

10.1149/ma2011-01/45/2064

https://openalex.org/W4252447752Licence: CC BY-NC-ND

Cite this

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title = "The Effects of Fabrication Process on the Performance of a CMOS Based Capacitive Humidity Sensor",

keywords = "Capacitive sensing, Fabrication, Humidity, CMOS, Materials science, Process (computing), Optoelectronics, Electrical engineering, Computer science, Engineering, Medicine, Physics, Meteorology, Alternative medicine, Pathology, Operating system",

author = "Alan Blake",

year = "2011",

doi = "10.1149/ma2011-01/45/2064",

language = "English",

journal = "Meeting Abstracts",

issn = "1091-8213",

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TY - JOUR

T1 - The Effects of Fabrication Process on the Performance of a CMOS Based Capacitive Humidity Sensor

AU - Blake, Alan

PY - 2011

Y1 - 2011

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KW - Fabrication

KW - Humidity

KW - CMOS

KW - Materials science

KW - Process (computing)

KW - Optoelectronics

KW - Electrical engineering

KW - Computer science

KW - Engineering

KW - Medicine

KW - Physics

KW - Meteorology

KW - Alternative medicine

KW - Pathology

KW - Operating system

U2 - 10.1149/ma2011-01/45/2064

DO - 10.1149/ma2011-01/45/2064

M3 - Article

SN - 1091-8213

JO - Meeting Abstracts

JF - Meeting Abstracts

ER -