@misc{100521ba0a3b4020a2698ac2602b09e2,
title = "The electromechanical properties of highly [100] oriented [Pb(Zr 0.52Ti0.48)O3, PZT] thin films",
abstract = "Lead zirconate titanate [Pb(Zr 0.52 Ti 0.48 )O 3 , PZT] thin films were deposited on Pt (111)/Ti/SiO 2 /Si and Pt (200)/Ti/SiO 2 /Si substrates by sol-gel method. Pyrolysis temperature and time were used to control the orientation of the thin films. A PbO buffer layer was also used to enhance the growth of (100)/(001) orientation. Poling highly (100) oriented PZT 52/48 thin films deposited on Pt (111) led to cracking and/or incomplete poling as a consequence of the additional residual stresses introduced by the a to c domain orientation switching. These problems of cracking and incomplete poling did not occur for the (100)/(001)-oriented PZT films deposited on the Pt (200), which possess high piezoelectric coefficients with maximum e 31,f and d 33,f of -13.9 4 C/m 2 and 80 25 pC/N, respectively. The elastic and electromechanical properties were measured using nanoindentation for films with different texture and compared with data obtained using a flexural method.",
author = "Marshall, \{J. M.\} and S. Corkovic and Q. Zhang and Whatmore, \{R. W.\} and C. Chima-Okereke and Roberts, \{W. L.\} and Bushby, \{A. J.\} and Reece, \{M. J.\}",
year = "2006",
month = nov,
day = "1",
doi = "10.1080/10584580600656437",
language = "English",
volume = "80",
series = "Integrated Ferroelectrics",
publisher = "Taylor and Francis Ltd.",
edition = "1",
type = "Other",
}