The impact of forming gas annealing on the electrical characteristics of sulfur passivated Al2O3/In0. 53Ga0. 47As (110) metal-oxide-semiconductor capacitors

Yen-Chun Fu; Uthayasankaran Peralagu; David AJ Millar; Jun Lin; Ian Povey; Xu Li; Scott Monaghan; Ravi Droopad; Paul K Hurley; Iain G Thayne

The impact of forming gas annealing on the electrical characteristics of sulfur passivated Al2O3/In0. 53Ga0. 47As (110) metal-oxide-semiconductor capacitors

Yen-Chun Fu
, Uthayasankaran Peralagu
, David AJ Millar
, Jun Lin
, Ian Povey
, Xu Li
, Scott Monaghan
, Ravi Droopad
, Paul K Hurley
, Iain G Thayne

Tyndall MicroNano Systems

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Applied Physics Letters
Publication status	Published - 2017

Cite this

@article{0ddac976f1e24db08e0b1810b94a0683,

title = "The impact of forming gas annealing on the electrical characteristics of sulfur passivated Al2O3/In0. 53Ga0. 47As (110) metal-oxide-semiconductor capacitors",

author = "Yen-Chun Fu and Uthayasankaran Peralagu and Millar, \{David AJ\} and Jun Lin and Ian Povey and Xu Li and Scott Monaghan and Ravi Droopad and Hurley, \{Paul K\} and Thayne, \{Iain G\}",

year = "2017",

language = "Undefined/Unknown",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

}

TY - JOUR

T1 - The impact of forming gas annealing on the electrical characteristics of sulfur passivated Al2O3/In0. 53Ga0. 47As (110) metal-oxide-semiconductor capacitors

AU - Fu, Yen-Chun

AU - Peralagu, Uthayasankaran

AU - Millar, David AJ

AU - Lin, Jun

AU - Povey, Ian

AU - Li, Xu

AU - Monaghan, Scott

AU - Droopad, Ravi

AU - Hurley, Paul K

AU - Thayne, Iain G

PY - 2017

Y1 - 2017

M3 - Article

SN - 0003-6951

JO - Applied Physics Letters

JF - Applied Physics Letters

ER -