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The influence of MBE growth conditions on optical properties of InAlGaAs/AlGaAs structures

  • K. Kosiel
  • , K. Regiński
  • , A. Szerling
  • , T. Piwoński
  • , M. Bugajski
  • Institute of Microelectronics and Photonics

Research output: Contribution to journalArticlepeer-review

Abstract

Optical properties of compressively strained In0.24Al 0.19Ga0.57As layers were investigated as a function of the MBE growth conditions. The optimum temperature of the crystal surface (T s) for MBE growth of this quaternary layer as well as the optimal cooling down process necessary for achieving appropriate Ts for InAlGaAs were experimentally found.

Original languageEnglish
JournalElectron Technology
Volume36
Publication statusPublished - 2004
Externally publishedYes

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