The pyrolysis of precursors for GaAs MOCVD studied by in-situ and ex-situ Fourier transform infrared spectroscopy

S. R. Armstrong; R. D. Hoare; M. E. Pemble; I. M. Povey; A. Stafford; A. G. Taylor; J. O. Williams

doi:10.1016/0022-0248(92)90430-Q

The pyrolysis of precursors for GaAs MOCVD studied by in-situ and ex-situ Fourier transform infrared spectroscopy

S. R. Armstrong
, R. D. Hoare
, M. E. Pemble
, I. M. Povey
, A. Stafford
, A. G. Taylor
, J. O. Williams

Research output: Contribution to journal › Article › peer-review

Abstract

The decomposition of arsine at atmospheric pressure as studied by in-situ and ex-situ Fourier transform infrared spectroscopy (FTIR) is presented, comparing the techniques. Ex-situ spectroscopic and spectrometric evidence for the formation of methylarsine and dimethylarsine during the reaction of trimethylgallium and arsine, and in-situ spectroscopic evidence for the formation of diethylarsine during the reaction of triethylgallium and arsine is discussed. The observation of alkylarsines strongly implies a stepwise free radical reaction mechanism, however whether these processes are heterogeneous or homogeneous remains uncler.

Original language	English
Pages (from-to)	10-15
Number of pages	6
Journal	Journal of Crystal Growth
Volume	124
Issue number	1-4
DOIs	https://doi.org/10.1016/0022-0248(92)90430-Q
Publication status	Published - 1 Nov 1992
Externally published	Yes

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10.1016/0022-0248(92)90430-Q

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@article{cc0942ab64794816a82f3f1009a38f78,

title = "The pyrolysis of precursors for GaAs MOCVD studied by in-situ and ex-situ Fourier transform infrared spectroscopy",

abstract = "The decomposition of arsine at atmospheric pressure as studied by in-situ and ex-situ Fourier transform infrared spectroscopy (FTIR) is presented, comparing the techniques. Ex-situ spectroscopic and spectrometric evidence for the formation of methylarsine and dimethylarsine during the reaction of trimethylgallium and arsine, and in-situ spectroscopic evidence for the formation of diethylarsine during the reaction of triethylgallium and arsine is discussed. The observation of alkylarsines strongly implies a stepwise free radical reaction mechanism, however whether these processes are heterogeneous or homogeneous remains uncler.",

author = "Armstrong, \{S. R.\} and Hoare, \{R. D.\} and Pemble, \{M. E.\} and Povey, \{I. M.\} and A. Stafford and Taylor, \{A. G.\} and Williams, \{J. O.\}",

year = "1992",

month = nov,

day = "1",

doi = "10.1016/0022-0248(92)90430-Q",

language = "English",

volume = "124",

pages = "10--15",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier B.V.",

number = "1-4",

}

TY - JOUR

T1 - The pyrolysis of precursors for GaAs MOCVD studied by in-situ and ex-situ Fourier transform infrared spectroscopy

AU - Armstrong, S. R.

AU - Hoare, R. D.

AU - Pemble, M. E.

AU - Povey, I. M.

AU - Stafford, A.

AU - Taylor, A. G.

AU - Williams, J. O.

PY - 1992/11/1

Y1 - 1992/11/1

N2 - The decomposition of arsine at atmospheric pressure as studied by in-situ and ex-situ Fourier transform infrared spectroscopy (FTIR) is presented, comparing the techniques. Ex-situ spectroscopic and spectrometric evidence for the formation of methylarsine and dimethylarsine during the reaction of trimethylgallium and arsine, and in-situ spectroscopic evidence for the formation of diethylarsine during the reaction of triethylgallium and arsine is discussed. The observation of alkylarsines strongly implies a stepwise free radical reaction mechanism, however whether these processes are heterogeneous or homogeneous remains uncler.

AB - The decomposition of arsine at atmospheric pressure as studied by in-situ and ex-situ Fourier transform infrared spectroscopy (FTIR) is presented, comparing the techniques. Ex-situ spectroscopic and spectrometric evidence for the formation of methylarsine and dimethylarsine during the reaction of trimethylgallium and arsine, and in-situ spectroscopic evidence for the formation of diethylarsine during the reaction of triethylgallium and arsine is discussed. The observation of alkylarsines strongly implies a stepwise free radical reaction mechanism, however whether these processes are heterogeneous or homogeneous remains uncler.

UR - https://www.scopus.com/pages/publications/0026944296

U2 - 10.1016/0022-0248(92)90430-Q

DO - 10.1016/0022-0248(92)90430-Q

M3 - Article

AN - SCOPUS:0026944296

SN - 0022-0248

VL - 124

SP - 10

EP - 15

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 1-4

ER -

The pyrolysis of precursors for GaAs MOCVD studied by in-situ and ex-situ Fourier transform infrared spectroscopy

Abstract

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