The structural and electrical characterization of a HfErOx dielectric for MIM capacitor DRAM applications

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Microelectronic Engineering
DOIs	https://doi.org/10.1016/J.MEE.2012.01.001
Publication status	Published - 2012

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@article{8385f36ff9ee46b9ac4075039365dc03,

title = "The structural and electrical characterization of a HfErOx dielectric for MIM capacitor DRAM applications",

author = "Ailbe O'Manachain",

year = "2012",

doi = "10.1016/J.MEE.2012.01.001",

language = "Undefined/Unknown",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

}