Thick PZT micro-features obtained by direct patterning of photosensitive precursor solution

S. Marson; R. A. Dorey; Q. Zhang; R. W. Whatmore

doi:10.1080/10584580390259001

Thick PZT micro-features obtained by direct patterning of photosensitive precursor solution

S. Marson
, R. A. Dorey
, Q. Zhang
, R. W. Whatmore

Tyndall Micronano Electronics

Research output: Other output › peer-review

Abstract

Thick lead zirconate titanate (PZT) microscale features were created by a single deposition step using a photosensitive film. The film was obtained by spin coating a solution of an amorphous PZT powder and acrylic acid onto platinised silicon substrates. The layer obtained was then patterned by exposure to UV light and developed. With this process it was possible to obtain PZT features 1.8 μm thick down to 3 μm in diameter.

Original language	English
Number of pages	9
Volume	54
DOIs	https://doi.org/10.1080/10584580390259001
Publication status	Published - 2003

Publication series

Name	Integrated Ferroelectrics
Publisher	Taylor and Francis Ltd.
ISSN (Print)	1058-4587

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@misc{e0fc19be69754514aa135e43fad2294c,

title = "Thick PZT micro-features obtained by direct patterning of photosensitive precursor solution",

abstract = "Thick lead zirconate titanate (PZT) microscale features were created by a single deposition step using a photosensitive film. The film was obtained by spin coating a solution of an amorphous PZT powder and acrylic acid onto platinised silicon substrates. The layer obtained was then patterned by exposure to UV light and developed. With this process it was possible to obtain PZT features 1.8 μm thick down to 3 μm in diameter.",

author = "S. Marson and Dorey, \{R. A.\} and Q. Zhang and Whatmore, \{R. W.\}",

year = "2003",

doi = "10.1080/10584580390259001",

language = "English",

volume = "54",

series = "Integrated Ferroelectrics",

publisher = "Taylor and Francis Ltd.",

type = "Other",

}

TY - GEN

T1 - Thick PZT micro-features obtained by direct patterning of photosensitive precursor solution

AU - Marson, S.

AU - Dorey, R. A.

AU - Zhang, Q.

AU - Whatmore, R. W.

PY - 2003

Y1 - 2003

N2 - Thick lead zirconate titanate (PZT) microscale features were created by a single deposition step using a photosensitive film. The film was obtained by spin coating a solution of an amorphous PZT powder and acrylic acid onto platinised silicon substrates. The layer obtained was then patterned by exposure to UV light and developed. With this process it was possible to obtain PZT features 1.8 μm thick down to 3 μm in diameter.

AB - Thick lead zirconate titanate (PZT) microscale features were created by a single deposition step using a photosensitive film. The film was obtained by spin coating a solution of an amorphous PZT powder and acrylic acid onto platinised silicon substrates. The layer obtained was then patterned by exposure to UV light and developed. With this process it was possible to obtain PZT features 1.8 μm thick down to 3 μm in diameter.

UR - https://www.scopus.com/pages/publications/31544471074

U2 - 10.1080/10584580390259001

DO - 10.1080/10584580390259001

M3 - Other output

AN - SCOPUS:31544471074

VL - 54

T3 - Integrated Ferroelectrics

ER -

Thick PZT micro-features obtained by direct patterning of photosensitive precursor solution

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