| Original language | English |
|---|---|
| Pages (from-to) | 1-2 |
| Number of pages | 2 |
| Journal | Thin Solid Films |
| Volume | 450 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 22 Feb 2004 |
| Event | Proceedings of Symposium M on Optical and X-Ray Metrology - Strasbourg, France Duration: 10 Jun 2003 → 13 Jun 2003 |
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