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Titanium as a micromechanical material
C. O'Mahony
, M. Hill
, P. J. Hughes
, W. A. Lane
Tyndall
Tyndall MicroNano Systems
University College Cork
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Engineering
Actuation
100%
Fixed Beam
100%
Finite Element Simulation
50%
Surface Micro-Machining
50%
Analytical Model
50%
Interferometry
50%
Residual Stress
50%
Young's Modulus
50%
Major Component
50%