@inbook{ff7ec2ed7ca748ba8af35ff0858730c9,
title = "Towards AlN optical cladding layers for thermal management in hybrid lasers",
abstract = "Aluminium Nitride (AlN) is proposed as a dual function optical cladding and thermal spreading layer for hybrid ridge lasers, replacing current benzocyclobutene (BCB) encapsulation. A high thermal conductivity material placed in intimate contact with the Multi-Quantum Well active region of the laser allows rapid heat removal at source but places a number of constraints on material selection. AlN is considered the most suitable due to its high thermal conductivity when deposited at low deposition temperatures, similar co-efficient of thermal expansion to InP, its suitable refractive index and its dielectric nature. We have previously simulated the possible reduction in the thermal resistance of a hybrid ridge laser by replacing the BCB cladding material with a material of higher thermal conductivity of up to 319 W/mK. Towards this goal, we demonstrate AlN thin-films deposited by reactive DC magnetron sputtering on InP.",
keywords = "aluminium nitride, hybrid laser, magnetron sputtering, Silicon photonics, thermal management, thin-film",
author = "Ian Mathews and Shenghui Lei and Kevin Nolan and Guillaume Levaufre and Alexandre Shen and Duan, \{Guang Hua\} and Brian Corbett and Ryan Enright",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; Integrated Photonics: Materials, Devices, and Applications III ; Conference date: 04-05-2015 Through 06-05-2015",
year = "2015",
doi = "10.1117/12.2178924",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Jean-Marc Fedeli",
booktitle = "Integrated Photonics",
address = "United States",
}