TY - GEN
T1 - Transformation dependence of lead zirconate titanate (PZT) as shown by PiezoAFMsurface mapping of sol-gel produced PZT on various substrates.
AU - Dunn, S.
AU - Whatmore, R. W.
PY - 2001
Y1 - 2001
N2 - PZT was grown on STP (Si/SiO2/Ti/Pt (Ti 5nm, Pt 100nm)), SAP (Si/Si3N4/AI/Ti/Pt (Al 100nm, Ti 10nm, Pt 15nm)) and GI (Glass/ITO(Indium Tin Oxide)). In each case the PZT underwent the same heat treatment, 200C for 2 minutes and then 530C for 5 minutes. The extent of perovskite formation was evaluated using Piezoresponse force microscopy (PFM). This provided information about the domain orientation and spatial distribution of ferroelectric material in the PZT film. This showed that PZT/STP underwent complete transformation to the perovskite phase. However, for the PZT/SAP and GI incomplete transformation to the perovskite occurred. A system of rosettes surrounded by an amorphous matrix developed. The size and density of the PZT rosettes on the surface was found to be substrate dependent. For Gi/PZT the density of rosettes formation is ca. 1/m2, compared to 4/m2 for PZT/SAP. The rosettes for the PZT on GI grow a maximum size of 2m, which compares to 1m for PZT on SAP. Differences in the observed growth rate and nucleation density are associated with the back electrode stability and crystal structure, effects that will be discussed in this paper.
AB - PZT was grown on STP (Si/SiO2/Ti/Pt (Ti 5nm, Pt 100nm)), SAP (Si/Si3N4/AI/Ti/Pt (Al 100nm, Ti 10nm, Pt 15nm)) and GI (Glass/ITO(Indium Tin Oxide)). In each case the PZT underwent the same heat treatment, 200C for 2 minutes and then 530C for 5 minutes. The extent of perovskite formation was evaluated using Piezoresponse force microscopy (PFM). This provided information about the domain orientation and spatial distribution of ferroelectric material in the PZT film. This showed that PZT/STP underwent complete transformation to the perovskite phase. However, for the PZT/SAP and GI incomplete transformation to the perovskite occurred. A system of rosettes surrounded by an amorphous matrix developed. The size and density of the PZT rosettes on the surface was found to be substrate dependent. For Gi/PZT the density of rosettes formation is ca. 1/m2, compared to 4/m2 for PZT/SAP. The rosettes for the PZT on GI grow a maximum size of 2m, which compares to 1m for PZT on SAP. Differences in the observed growth rate and nucleation density are associated with the back electrode stability and crystal structure, effects that will be discussed in this paper.
KW - Ferroelectric domains
KW - Nucleation
KW - Piezoresponse force microsopy
KW - PZT
UR - https://www.scopus.com/pages/publications/0012737824
U2 - 10.1080/10584580108016916
DO - 10.1080/10584580108016916
M3 - Other output
AN - SCOPUS:0012737824
VL - 38
T3 - Integrated Ferroelectrics
ER -