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Uniform coating of high aspect ratio surfaces through atomic layer deposition

  • Mark Nolan
  • , Ian Povey
  • , Simon Elliot
  • , Nicolas Cordero
  • , Martyn Pemble
  • , Brian Shortt
  • , Marcos Bavdaz
  • ESTEC - European Space Research and Technology Centre

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

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