UV assisted rapid thermal processing of strontium bismuth tantalate (SBT) thin films

S. O'Brien; P. K. Hurley; G. M. Crean; J. Johnson; C. Caputa; D. Wouters

UV assisted rapid thermal processing of strontium bismuth tantalate (SBT) thin films

S. O'Brien
, P. K. Hurley
, G. M. Crean
, J. Johnson
, C. Caputa
, D. Wouters

Research output: Contribution to journal › Article › peer-review

Abstract

A novel technique termed UV-assisted RTP has been developed and found to offer improvement in material properties, in particular when applied to thin films. Regarding crystallization of SET, a number of UV-RTP strategies were developed and evaluated. It was demonstrated that UV irradiation of the sample material at a temperature in excess of the MOCVD deposition temperature was found to produce a significant increase in P_r.

Original language	English
Article number	D3.18
Pages (from-to)	177-181
Number of pages	5
Journal	MRS Advances
Volume	830
Publication status	Published - 2005
Event	Materials and Processes for Nonvolatile Memories - Boston, MA, United States Duration: 30 Nov 2004 → 2 Dec 2004

Cite this

@article{6d1c7033b5c24484b0d0a24b4f0f570f,

title = "UV assisted rapid thermal processing of strontium bismuth tantalate (SBT) thin films",

abstract = "A novel technique termed UV-assisted RTP has been developed and found to offer improvement in material properties, in particular when applied to thin films. Regarding crystallization of SET, a number of UV-RTP strategies were developed and evaluated. It was demonstrated that UV irradiation of the sample material at a temperature in excess of the MOCVD deposition temperature was found to produce a significant increase in Pr.",

author = "S. O'Brien and Hurley, \{P. K.\} and Crean, \{G. M.\} and J. Johnson and C. Caputa and D. Wouters",

year = "2005",

language = "English",

volume = "830",

pages = "177--181",

journal = "MRS Advances",

issn = "0272-9172",

publisher = "Springer Nature",

note = "Materials and Processes for Nonvolatile Memories ; Conference date: 30-11-2004 Through 02-12-2004",

}

TY - JOUR

T1 - UV assisted rapid thermal processing of strontium bismuth tantalate (SBT) thin films

AU - O'Brien, S.

AU - Hurley, P. K.

AU - Crean, G. M.

AU - Johnson, J.

AU - Caputa, C.

AU - Wouters, D.

PY - 2005

Y1 - 2005

N2 - A novel technique termed UV-assisted RTP has been developed and found to offer improvement in material properties, in particular when applied to thin films. Regarding crystallization of SET, a number of UV-RTP strategies were developed and evaluated. It was demonstrated that UV irradiation of the sample material at a temperature in excess of the MOCVD deposition temperature was found to produce a significant increase in Pr.

AB - A novel technique termed UV-assisted RTP has been developed and found to offer improvement in material properties, in particular when applied to thin films. Regarding crystallization of SET, a number of UV-RTP strategies were developed and evaluated. It was demonstrated that UV irradiation of the sample material at a temperature in excess of the MOCVD deposition temperature was found to produce a significant increase in Pr.

UR - https://www.scopus.com/pages/publications/20344390258

M3 - Article

AN - SCOPUS:20344390258

SN - 0272-9172

VL - 830

SP - 177

EP - 181

JO - MRS Advances

JF - MRS Advances

M1 - D3.18

T2 - Materials and Processes for Nonvolatile Memories

Y2 - 30 November 2004 through 2 December 2004

ER -

UV assisted rapid thermal processing of strontium bismuth tantalate (SBT) thin films

Abstract

Other files and links

Fingerprint

Cite this