V-band frequency reconfigurable cavity-based bandpass filters

Research output: Chapter in Book/Report/Conference proceedingsConference proceedingpeer-review

Abstract

Two-pole and three-pole RF-MEMS-enabled tunable bandpass filters are demonstrated as the first all-silicon frequency reconfigurable cavity filters operating in the V band. They are tuned by means of electrostatically-actuated corrugated MEMS diaphragms that are located on top of evanescent-mode cavity resonators. The two-pole filter exhibits tunable center frequency between 57.7 to 63 GHz with worst-case insertion loss (IL) of 2.8 dB and maximum actuation voltage of 140 V. The three-pole filter demonstrates tunable frequency between 61.9 to 65 GHz with a maximum actuation voltage of 150 V and IL better than 4.9 dB.

Original languageEnglish
Title of host publication2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509012596
DOIs
Publication statusPublished - 4 May 2016
Externally publishedYes
EventIEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Honolulu, United States
Duration: 13 Mar 201617 Mar 2016

Publication series

Name2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings

Conference

ConferenceIEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016
Country/TerritoryUnited States
CityHonolulu
Period13/03/1617/03/16

Keywords

  • Evanescent-mode cavity
  • RF-MEMS
  • tunable filter
  • V-band

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