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VN Thin Films via MOCVD Using a New Vanadium Precursor: Linking Growth Chemistry to Functional Surface Properties

  • Jean Pierre Glauber
  • , Julian Lorenz
  • , Ji Liu
  • , Marietta Seifert
  • , Volker Hoffmann
  • , Carlos Abad
  • , Detlef Rogalla
  • , Lars Giebeler
  • , Corinna Harms
  • , Michael Wark
  • , Michael Nolan
  • , Anjana Devi
  • Leibniz Institute for Solid State and Materials Research Dresden
  • Ruhr University Bochum
  • German Aerospace Center
  • Federal Institute for Materials Research and Testing Berlin
  • University of Oldenburg
  • Technische Universität Dresden
  • Fraunhofer Institute for Microelectronic Circuits and Systems

Research output: Contribution to journalArticlepeer-review

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