TY - GEN
T1 - W-band tunable reflective type phase shifter based on waveguide-mounted RF MEMS
AU - Psychogiou, D.
AU - Hesselbarth, J.
AU - Li, Y.
AU - Kuehne, S.
AU - Hierold, C.
PY - 2011
Y1 - 2011
N2 - A novel concept for a continuously variable W-band phase shifter is proposed. It is based on a ridge waveguide resonator tuned by MEMS-actuated conductive fingers that interact with the fields beneath the ridge. The rotation of anti-parallel oriented MEMS conductive fingers of about half wavelength size realize a distributed interaction with the purposely structured waveguide ridge. In such a way, large transmission phase variations are obtained. By cascading an additional resonator and a waveguide short, a reflection type phase shifter is created with a single MEMS. For MEMS finger deflection angles between 0° and 7.5°, this device realizes reflection phase shift variation of 381° and a reflection coefficient magnitude of better than -1.65 dB at a frequency of 106.5 GHz. This corresponds to a figure of merit of 230°/dB.
AB - A novel concept for a continuously variable W-band phase shifter is proposed. It is based on a ridge waveguide resonator tuned by MEMS-actuated conductive fingers that interact with the fields beneath the ridge. The rotation of anti-parallel oriented MEMS conductive fingers of about half wavelength size realize a distributed interaction with the purposely structured waveguide ridge. In such a way, large transmission phase variations are obtained. By cascading an additional resonator and a waveguide short, a reflection type phase shifter is created with a single MEMS. For MEMS finger deflection angles between 0° and 7.5°, this device realizes reflection phase shift variation of 381° and a reflection coefficient magnitude of better than -1.65 dB at a frequency of 106.5 GHz. This corresponds to a figure of merit of 230°/dB.
KW - millimeter-wave phase shifter
KW - RF MEMS
KW - tunable resonator
UR - https://www.scopus.com/pages/publications/82055207301
U2 - 10.1109/IMWS3.2011.6061894
DO - 10.1109/IMWS3.2011.6061894
M3 - Conference proceeding
AN - SCOPUS:82055207301
SN - 9781612849652
T3 - 2011 IEEE MTT-S International Microwave Workshop Series on Millimeter Wave Integration Technologies, IMWS 2011
SP - 85
EP - 88
BT - 2011 IEEE MTT-S International Microwave Workshop Series on Millimeter Wave Integration Technologies, IMWS 2011
T2 - 2011 IEEE MTT-S International Microwave Workshop on Millimeter Wave Integration Technologies, IMWS 2011, Collocated with the 2011 IEEE RFID - Technologies and Applications Conference, RFID-TA 2011
Y2 - 15 September 2011 through 16 September 2011
ER -