W-band tunable reflective type phase shifter based on waveguide-mounted RF MEMS

Research output: Chapter in Book/Report/Conference proceedingsChapterpeer-review

Abstract

A novel concept for a continuously variable W-band phase shifter is proposed. It is based on a ridge waveguide resonator tuned by MEMS-actuated conductive fingers that interact with the fields beneath the ridge. The rotation of anti-parallel oriented MEMS conductive fingers of about half wavelength size realize a distributed interaction with the purposely structured waveguide ridge. In such a way, large transmission phase variations are obtained. By cascading an additional resonator and a waveguide short, a reflection type phase shifter is created with a single MEMS. For MEMS finger deflection angles between 0° and 7.5°, this device realizes reflection phase shift variation of 381° and a reflection coefficient magnitude of better than -1.65 dB at a frequency of 106.5 GHz. This corresponds to a figure of merit of 230°/dB.

Original languageEnglish
Title of host publication2011 IEEE MTT-S International Microwave Workshop Series on Millimeter Wave Integration Technologies, IMWS 2011
Pages85-88
Number of pages4
DOIs
Publication statusPublished - 2011
Externally publishedYes
Event2011 IEEE MTT-S International Microwave Workshop on Millimeter Wave Integration Technologies, IMWS 2011, Collocated with the 2011 IEEE RFID - Technologies and Applications Conference, RFID-TA 2011 - Sitges, Spain
Duration: 15 Sep 201116 Sep 2011

Publication series

Name2011 IEEE MTT-S International Microwave Workshop Series on Millimeter Wave Integration Technologies, IMWS 2011

Conference

Conference2011 IEEE MTT-S International Microwave Workshop on Millimeter Wave Integration Technologies, IMWS 2011, Collocated with the 2011 IEEE RFID - Technologies and Applications Conference, RFID-TA 2011
Country/TerritorySpain
CitySitges
Period15/09/1116/09/11

Keywords

  • millimeter-wave phase shifter
  • RF MEMS
  • tunable resonator

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