Abstract
We discuss unreported transitions of oxidized GaAs surfaces between (super)hydrophilic and hydrophobic states when stored in ambient conditions. Contact angles higher than 90 and high adhesive force were observed for several air-aged epitaxial samples grown under different conditions as well as on epi-ready wafers. Regardless of the morphologies of the surface, superhydrophilicity of oxygen-plasma treated samples was observed, an effect disappearing with storage time. Reproducible hydrophobicity was likewise observed, as expected, after standard HCl surface etching. The relation between surface oxides and hydrophobic/hydrophilic behavior is discussed.
| Original language | English |
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| Article number | 034319 |
| Journal | Journal of Applied Physics |
| Volume | 110 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 1 Aug 2011 |