Wettability and "petal effect" of GaAs native oxides

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Abstract

We discuss unreported transitions of oxidized GaAs surfaces between (super)hydrophilic and hydrophobic states when stored in ambient conditions. Contact angles higher than 90 and high adhesive force were observed for several air-aged epitaxial samples grown under different conditions as well as on epi-ready wafers. Regardless of the morphologies of the surface, superhydrophilicity of oxygen-plasma treated samples was observed, an effect disappearing with storage time. Reproducible hydrophobicity was likewise observed, as expected, after standard HCl surface etching. The relation between surface oxides and hydrophobic/hydrophilic behavior is discussed.

Original languageEnglish
Article number034319
JournalJournal of Applied Physics
Volume110
Issue number3
DOIs
Publication statusPublished - 1 Aug 2011

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