XPS investigation of UV-annealed ultrathin Ta2O5 films on silicon
- Q. Fang
- , J. Y. Zhang
- , Z. M. Wang
- , J. X. Wu
- , B. J. O'Sullivan
- , P. K. Hurley
- , T. L. Leedham
- , M. A. Audier
- , J. P. Sénateur
- , I. W. Boyd
- University College London
Research output: Contribution to journal › Article › peer-review