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XPS investigation of UV-annealed ultrathin Ta2O5 films on silicon

  • Q. Fang
  • , J. Y. Zhang
  • , Z. M. Wang
  • , J. X. Wu
  • , B. J. O'Sullivan
  • , P. K. Hurley
  • , T. L. Leedham
  • , M. A. Audier
  • , J. P. Sénateur
  • , I. W. Boyd
  • University College London

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